Mechanical behavior of artificially multilayered thin films Robert C. Cammarata Department of Materials Science and Engineering The Johns Hopkins University Baltimore, MD 21218 Artificially multilayered thin films such as those used for x-ray mirrors have shown unusual and often enhanced mechanical behavior when the bilayer repeat length is reduced below about 10 nm. In many cases, this unusual behavior can be understood as owing to the high density of interfaces characteristic of these materials. Elastic modulus variations of order 10 to 50% have been observed in certain metallic systems. This behavior is intriguing as elastic properties are considered to be among the most microstructurally insensitive. The origin of the modulus variations remains controversial. Substantial enhancements in the yield strength and hardness have been reported for many multilayered films. There has been a great deal of recent interest in modeling this behavior, with an eye toward understanding how the enhancements scale with bilayer repeat length. It appears that the hardness increases are results of the difference in elastic modulus between neighboring layers that introduce image forces on dislocations and impede their motion. The enhanced hardness makes artificially multilayered thin films of interest technologically as protective coating materials. Although the elastic and hardness behavior have been the most heavily studied, artificially multilayered thin films have also displayed other interesting behavior including enhanced anelastic and tribological properties.