High resolution X-ray scattering characterization of various surfaces relevant
for multilayers and thin film coatings

Salim Abdali, Finn E.  Christensen and Allan Hornstrup

Danish Space Research Institute, Gl Lundtoftevej 7, 2800 Lyngby, Denmark
e-mail:  salim@dsri dk

Different substrates and thin film surfaces were analysed utilizing two high
resolution x-ray scattering setups In these Cu-Ka (8 05 keV) setups a
resolution of 15 Arcsec and 4 5 Arcsec were achieved, employing channel cut
single crystals with 3 and 5 reflections, respectively The samples were; three
different silicon single crystals, two different sides of float glass, thin
glass of different thicknesses (0 05mm-0 2mm), thin gold film on lacquered
luminium foil and an epoxy replicated Au-film, likewise on an aluminuim foil
Roughness and correlation length were deduced from these measurements, which
were carried out in the total reflection region, below the critical angle